The Planning and Zoning Commission at its meeting March 12 unanimously approved ASML’s proposed expansion.

Commissioners at earlier hearings had expressed concerns about lighting that would emanate from the planned 45,000-square-foot building addition, and from the parking garage, as well as noise levels, but those were  addressed.

The expansion project will cost more than $100 million and create 500 new engineering and manufacturing jobs at the facility on Danbury Road over the next several years.

Gov. Dannel P. Malloy visited ASML offices at 60 Danbury Road Feb. 8 to help tout the company’s expansion.

“It’s exciting to see the opportunity for 500 additional jobs being created in this marketplace by this great company, understanding the broad reach of this company and what it means to see this investment made in Connecticut and in this site, and quite frankly, I think it speaks well of our efforts in advanced manufacturing,” Malloy said. All the projects will be completed within the next two years.